Skip to main content
SpringerLink
Log in

Techniques in the Development of Micromachine Tool Prototypes & Their Applications in Microfactories MET Technology

  • Chapter
MEMS/NEMS

  • 7239 Accesses

Abstract

At present, many areas of industry have strong tendencies towards miniaturization of products. Mechanical components of these products as a rule are manufactured using conventional large-scale equipment or micromechanical equipment based on microelectronic technology (MEMS). The first method has some drawbacks because conventional largescale equipment consumes much energy, space and material. The second method seems to be more advanced but has some limitations, for example, two-dimensional (2D) or 2.5-dimensional shapes of components and materials compatible with silicon technology. Here we consider an alternative technology of micromechanical device production. This technology is based on micromachine tools (MMT) and microassembly devices, which can be produced as sequential generations of microequipment. The first generation can be produced by conventional large-scale equipment. The machine tools of this generation can have overall sizes of 100–200 mm. Using microequipment of this generation, second generation microequipment having smaller overall sizes can be produced. This process can be repeated to produce generations of micromachine tools having overall sizes of some millimeters. In this work we analyze the problems of microequipment miniaturization and give some results of first generation microequipment prototyping. Amicromachining center having an overall size of 130 × 160 × 85mm3 was produced and characterized. This center has allowed us to manufacture micromechanical details having sizes from 50 µm to 5 mm. These details have complex three-dimensional shapes (for example, screw, gear, graduated shaft, conic details, etc.), and are made from different materials, such as brass, steel, different plastics etc. Earlier in a Japanese project micromachine tools and micromanipulators were created with expensive elements of precision technology. The high cost of such microequipment slows down its promotion to the market. We propose another method of micromachine tool and micromanipulator creation. We do not use the expensive elements. To obtain the necessary precision we utilize the natural advantages of equipment of small size. The error analysis of the microequipment made in this work shows that the miniaturization of the microequipment automatically leads to decreasing of the errors of the micromachine tools. Examples of the developed microequipment prototypes are given. We have started to investigate and to make prototypes of the assembly microdevices controlled by a computer vision system. In this paper we also describe an example of the applications (microfilters) for the proposed technology.

This is a preview of subscription content, log in via an institution to check access.

Access this chapter

Log in via an institution
Chapter
USD 29.95
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
eBook
USD 429.00
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
Softcover Book
USD 549.99
Price excludes VAT (USA)
  • Compact, lightweight edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info
Hardcover Book
USD 549.99
Price excludes VAT (USA)
  • Durable hardcover edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Purchases are for personal use only

Institutional subscriptions

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

References

  1. Kussul, E.M., Rachkovskij, D.A., Baidyk, T.N., et al., Micromechanical Engineering: A Basis Fot the Low Cost Manufacturing of Mechanical Microdevices Using Microequipment, J. Micromech. Microeng., 1996;6: 410–425.

    Article  Google Scholar 

  2. Ohlckers, P., Hanneborg, A., and Nese, M., Batch Processing for Micromachined Devices, J. Micromech. Microeng., 1995;5:47–56.

    Article  CAS  Google Scholar 

  3. Handbook of Microlithography, Micromachining, and Microfabrication: Micromachining and Microfabrication. P. Rai-Choundhury (Ed.), SPIE Press, Vol. 2, 1997, p. 622.

    Google Scholar 

  4. Micromechanics and MEMS. Classsical and Seminal Papers to 1990, W.S. Trimmer (Ed.), IEEE Press, New York, 1997, p. 701.

    Google Scholar 

  5. Kussul E., Baidyk, T., Rachkovskij, D., and Talaev, S., The Method of Micromechanical Manufacture. Patent N 2105652, Russia, 27.02.1998, Priority from 2.02.1996 (in Russian).

    Google Scholar 

  6. Kussul, E., Baidyk, T., Rachkovskij, D., and Talaev, S., The Method of Micromechanical Manufacture. Patent N 24091, Ukraine, 31.08.1998, priority from 17.01.1996 (in Ukrainian).

    Google Scholar 

  7. Naotake Ooyama, Shigeru Kokaji, Makoto Tanaka and others. Desktop Machining Microfactory, Proceedings of the 2-nd International Workshop on Microfactories, Switzerland, Oct. 9–10, 2000, pp. 13–16.

    Google Scholar 

  8. Kussul, E., Baidyk, T., Ruiz-Huerta, L., Caballero, A., Velasco, G., and Kasatkina, L., Development of Micromachine Tool Prototypes for Microfactories, Journal of Micromechanics and Microengineering, 2002; 12:795–812.

    Article  Google Scholar 

  9. Ohlckers, P. and Jakobsen, H., High Volume Production of Silicon Sensor Microsystems for Automotive Applications, IEEE Colloquium on Assembly and Connection in Microsystems (Digest No 1997/004), 1997, pp. 8/1–8/7.

    Google Scholar 

  10. Eddy, D.S. and Sparks, D.R., Application of MEMS Technology in Automotive Sensors and Actuators, Proceedings of the IEEE, 1998, Vol. 86, No. 8, pp. 1747–1755.

    Article  Google Scholar 

  11. Tang, T.K., Gutierrez, R.C., Stell, C.B., Vorperian, V., Arakaki, G.A., Rice, G.T., Li, W.J., Chakraborty, I., Shcheglow, K., Wilcox, J.Z., and Kaiser, W.J., A Packaged Silicon MEMS Vibratory Gyroscope for Microspacecraft, 10-th Annual International Workshop on Micro Electro Mechanical Systems, 1997, pp. 500–505.

    Google Scholar 

  12. Norvell, B.R., Hancock, R.J., Smith, J.K., Pugh, M.L., Theis, S.W., and Kriatkofsky, J., Micro Electro Mechanical Switch (MEMS) Technology Applied to Electronically Scanned Arrays for Space Based Radar, Aerospace Conference, Proceedings, 1999, Vol. 3, pp. 239–247.

    Google Scholar 

  13. Madni, A.M. and Wan, L.A., Micro Electro Mechanical Systems (MEMS): An Overview of Current State-of-the Art, Aerospace Conference, IEEE, 1998, Vol. 1, pp. 421–427.

    Google Scholar 

  14. Janson, S., Helvajian, H., Amimoto, S., Smit, G., Mayer, D., and Feuerstein, S., Microtechnology for Space Systems, Aerospace Conference, IEEE, 1998, Vol. 1, pp. 409–418.

    Google Scholar 

  15. Minor, R.R. and Rowe, D.W., Utilization of GPS/MEMS-IMU for Measurement of Dynamics for Range Testing of Missiles and Rockets, Position Location and Navigation Symposium, IEEE 1998, pp. 602–607.

    Google Scholar 

  16. Yu-Chong, Tai., Aerodynamic Control of a Delta-wing Using MEMS Sensors and Actuators, Proceedings of the 1997 International Symposium on Micromechatronics and Human Science, 1997, pp. 21–26.

    Google Scholar 

  17. Fujita, H., Microactuators and Micromachines, Proceedings of the IEEE, 1998, Vol. 86, No. 8, pp. 1721–1732.

    Article  Google Scholar 

  18. Comtois, J.H., Michalicek, M.A., Clark, N., and Cowan, W., MOEMS for Adaptive Optics. Broadband Optical Networks and Technologies: An Emerging Reality/Optical MEMS/Smart Pixels/Organic Optics and Optoelectronics. 1998, IEEE/LEOS Summer Topical Meetings, 1998, pp. II/95–II/96.

    Google Scholar 

  19. McCormick, F.B., Optical MEMS Potentials in Optical Storage. Broadband Optical Networks and Technologies: An Emerging Reality/Optical MEMS/Smart Pixels/Organic Optics and Optoelectronics, IEEE/LEOS Summer Topical Meetings, 1998, pp. II/5–II/6.

    Google Scholar 

  20. Kuwano, H., MEMS for Telecommunication Systems, Proceedings of the 7-th International Symposium on Micro Machine and Human Science, 1996, pp. 21–28.

    Google Scholar 

  21. Johnson, M.D., Hughes, G.A., Gitlin, M.L., Loebel, N.G., and Paradise, N.F., Cathode Ray Addressed Micromirror Display, Proceedings of the 13-th Biennial University/Government/Industry Microelectronics Symposium, 1999, pp. 158–160.

    Google Scholar 

  22. Brown, E.R., RF-MEMS Switches for Reconfigurable Integrated Circuits, IEEE Transactions on Microwave Theory and Techniques, 1998;46(11):1868–1880.

    Article  CAS  Google Scholar 

  23. Pillans, B., Eshelman, S., Malczewski, A., Ehmke, J., and Goldsmith, C., Ka-band RF MEMS Phase Shifters, IEEE Microwave and Guided Wave Letters., 1999;9:520–522.

    Article  Google Scholar 

  24. Wu, H.D., Harsh, K.F., Irwin, R.S., Wenge, Zhang, Mickelson, A.R., Lee, Y.C., and Dobsa, J.B. MEMS Designed for Tunable Capacitors, Microwave Symposium Digest, 1998 IEEE MTT-S International, 1998, Vol. 1, pp. 127–129.

    Google Scholar 

  25. Wu, S., Mai, J., Tai, Y.C., and Ho, C.M., Micro Heat Exchanger by Using MEMS Impinging Jets, 12-th IEEE International Conference on Micro Electro Mechanical Systems, 1999, pp. 171–176.

    Google Scholar 

  26. Rachkovskij, D.A., Kussul, E.M., and Talayev, S.A., Heat Exchange in Short Microtubes and Micro Heat Exchangers with Low Hydraulic Losses, Microsystem Technologies, 1998;4:151–158.

    Article  Google Scholar 

  27. Bier, W., Keller, W., Linder, G., Siedel, D., Schubert, K., and Martin, H., Gas-to Gas Transfer in Micro Heat Exchangers, Chemical Engineering and Processing, 1993;32:33–43.

    Article  CAS  Google Scholar 

  28. Friedrich, C. and Kang, S., Micro Heat Exchangers Fabricated by Diamand Machining, Precision Engineering, 1994;16:56–59.

    Article  Google Scholar 

  29. Katsura, S., Hirano, K., Yamaguchi, A., Ishii, R., Imayou, H., Matsusawa, Y., and Mizuno, A., Manipulation of Chromosomal DNA and Localization of Enzymatic Activity, Industry Applications Conference, 1997. 32-th IAS Annual Meeting IAS’97. Conference Record of the 1997 IEEE, 1997, Vol. 3, pp. 1983–1989.

    Article  Google Scholar 

  30. Dohi, T., Computer Aided Surgery and Micro Machine, Proceedings of the 6-th International Symposium on Micro Machine and Human Science, MHS’95, 1995, pp. 21–24.

    Google Scholar 

  31. Cibuzar, G., Polla, D., and McGlennen, R., Biomedical MEMS Research at the University of Minnesota, Proceedings of the 12-th Biennial University/Government/Industry Microelectronics Symposium, 1997, pp. 145–149.

    Google Scholar 

  32. Sun, L., Sun, P., Qin, X., and Wang, C., Micro Robot in Small Pipe with Electromagnetic Actuator, International Symposium on Micromechatronics and Human Science, 1998, pp. 243–248.

    Google Scholar 

  33. Caprari G., Balmer P., Piguet R., and Siegwart R., The Autonomous Micro Robot Alice: A Platform for Scientific and Commercial Applications, International Symposium on Micromechatronics and Human Science, 1998, pp. 231–235.

    Google Scholar 

  34. Hayashi I. and Iwatsuki N. Micro Moving Robotics, International Symposium on Micromechatronics and Human Science, 1998, pp. 41–50.

    Google Scholar 

  35. http://www.siliconstrategies.com/story/OEG20020827S0031.

    Google Scholar 

  36. Micro Mechanical Systems: Principles and Technology, T. Fukuda and W. Menz (Eds.), Elsevier Science B.V., 1998, p. 268.

    Google Scholar 

  37. Mazuzawa T., An Approach to Micromachining through Machine Tool Technology, Proc. 2nd Int. Symp. Micro Machine and Human Science (Nagoya, Japan), 1991, pp. 47–52.

    Google Scholar 

  38. Friedrich C.R. and Vasile M.J., Development of the Micromilling Process for High-Aspect-Ratio Micro Structures, J. Microelectromechanical Systems, 1996;5:33–38.

    Article  Google Scholar 

  39. Friedrich C.R. and Kang S.D., Micro Heat Exchangers Fabricated by Diamond Machining, Precision Engineering, 1994, Vol. 16, pp. 56–59.

    Article  Google Scholar 

  40. Yamagata, Y. and Higuchi, T., Four Axis Ultra Precision Machine Tool and Fabrication of Micro Parts by Precision Cutting Technique, Proc. 8th Int. Precision Engineering Seminar (Compiegne, France), 1995, pp. 467–470.

    Google Scholar 

  41. Ishihara, H., Arai, F., and Fukuda, T., Micro Mechatronics and Micro Actuators, IEEE/ASME Transactions on Mechatronics, 1996;1:68–79.

    Article  Google Scholar 

  42. Some Micro Machine Activities in Japan, Report ATIP96.021, 1996.

    Google Scholar 

  43. Okazaki Yuichi and Kitahara Tokio., Micro-Lathe Equipped with Closed-Loop Numerical Control, Proceedings of the 2-nd International Workshop on Microfactories, Switzerland, Oct. 9–10, 2000, pp. 87–90.

    Google Scholar 

  44. Maekawa, H. and Komoriya, K., Development of a Micro Transfer Arm for a Microfactory, Proceedings of the 2001 IEEE International Conference on Robotics & Automation, Seoul, Korea, May 2001, pp. 1444–1451.

    Google Scholar 

  45. Bleuler, H., Clavel, R., Breguet, J-M., Langen, H., and Pernette, E., Issues in Precision Motion Control and Microhandling, Proceedings of the 2000 IEEE International Conference On Robotics & Automation, San Francisco, 2000, pp. 959–964.

    Google Scholar 

  46. Ishikawa, Yu. and Kitahara, T., Present and Future of Micromechatronics, 1997 International Symposium on Micromechatronics and Human Science, 1997, pp. 13–20.

    Google Scholar 

  47. Naotake Ooyama, Shigeru Kokaji, Makoto Tanaka and others. Desktop Machining Microfactory, Proceedings of the 2-nd International Workshop on Microfactories, Switzerland, Oct. 9–10, 2000, pp. 14–17.

    Google Scholar 

  48. Trimmer W.S.N., Microrobots and Micromachenical Systems, in Sensors and Actuators, 1989, Vol. 19, pp. 267–287.

    Article  Google Scholar 

  49. Florussen, G.H.J., Delbressine, F.L.M., van de Molengraft, M.J.G., and Schellekens, P.H.J., Assessing Geometrical Errors of Multi-axis Machines by Three-dimensional Length Measurement, J. Measurement, 2001;30:241–255.

    Article  Google Scholar 

  50. Kussul E. and Baidyk T., Neural Random Threshold Classifier in OCR Application, in Proceedings of the Second All-Ukrainian International Conference, Kiev, Ukraine, 1994, pp. 154–157.

    Google Scholar 

  51. Kussul E., Baidyk T., Lukovitch V., and Rachkovskij D., Adaptive High Performance Classifier Based on Random Threshold Neurons, in R. Trappl (Ed.), Cybernetics and Systems’94 (Singapore: World Scientific Publishing Co. Pte. Ltd.), 1994, pp. 1687–1695.

    Google Scholar 

  52. Baidyk, T., Application of Flat Image Recognition Technique for Automation of Micro Device Production, in Proceedings of 2001 IEEE/ASME International Conference on Advanced Intelligent Mechatronics, Teatro Sociale Como, Italy, 2001, pp. 488–494.

    Google Scholar 

  53. Baidyk, T. and Kussul, E., Application of Neural Classifier for Flat Image Recognition in the Process of Microdevice Assembly, in Proceedings of IEEE International Joint Conference on Neural Networks, Hawaii, USA, 2002, Vol. 1, pp. 160–164.

    Google Scholar 

  54. Baidyk, T., Kussul, E., Makeyev, O., Caballero, A., Ruiz, L., Carrera, G., and Velasco, G., Flat Image Recognition in the Process of Microdevice Assembly, Pattern Recognition Letters, 2004;25(1):107–118.

    Article  Google Scholar 

  55. LeCun, Y., Bottou, L., Bengio, Y., and Haffner, P., Gradient-based Learning Applied to Document Recognition, Proceedings of the IEEE, November 1998, Vol. 86, No. 11, pp. 2278–2344.

    Article  Google Scholar 

  56. Makeyev, O., Neural Interpolator for Image Recognition in the Process of Microdevice Assembly, in the proceedings: IEEE IJCNN’2003, Portland, Oregon, USA, July 20–24, 2003, Vol. 3, pp. 2222–2226.

    Google Scholar 

  57. Baidyk, T., Kussul, E., and Makeyev, O., Image Recognition System for Microdevice Assembly, Twenty-First IASTED International Multi-Conference on Applied Informatics, AI2003, Innsbruck, Austria, 2003, pp. 243–248.

    Google Scholar 

  58. Yang, X., Yang, M.J., Wang, X. O., Meng, E., Tai, Y.C., and Ho Jan, C.M., Micromachined Membrane Particle Filters, Proceedings of The Eleventh Annual International Workshop on Micro Electro Mechanical Systems, MEMS 98, January 1998, pp. 137–142.

    Google Scholar 

  59. Kussul, E., Control Paralelo de Máquinas Herramientas, Congreso SOMI’XVI, Querétero, México, Octubre 15–19, 2001, p. 7.

    Google Scholar 

  60. Kussul, E. and López Walle, B., Tecnología de Alambrado Por Tejido Alambre Magneto, Congreso SOMI XVII, Mérida, Yucatán, México, Octubre 14–18, 2002, p. 8.

    Google Scholar 

Download references

Author information

Authors and Affiliations

  1. CCADET, UNAM, Mexico, D.F.

    E. Kussul, T. Baidyk, L. Ruiz-Huerta, A. Caballero-Ruiz & G. Velasco

  2. Kyiv National Taras Shevchenko University, Ukraine

    O. Makeyev

Authors
  1. E. Kussul
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. T. Baidyk
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. L. Ruiz-Huerta
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. A. Caballero-Ruiz
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. G. Velasco
    View author publications

    You can also search for this author in PubMed Google Scholar

  6. O. Makeyev
    View author publications

    You can also search for this author in PubMed Google Scholar

Editor information

Editors and Affiliations

  1. University of California, Los Angeles, USA

    Cornelius T. Leondes

Rights and permissions

Reprints and permissions

Copyright information

© 2006 Springer Science+Business Media, Inc.

About this chapter

Cite this chapter

Kussul, E., Baidyk, T., Ruiz-Huerta, L., Caballero-Ruiz, A., Velasco, G., Makeyev, O. (2006). Techniques in the Development of Micromachine Tool Prototypes & Their Applications in Microfactories MET Technology . In: Leondes, C.T. (eds) MEMS/NEMS. Springer, Boston, MA. https://doi.org/10.1007/0-387-25786-1_17

Download citation

Publish with us

Policies and ethics

Search

Navigation