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References

  1. Hohm, D. and Hess, G. A subminiature condenser microphone with silicon nitrite membrane and silicon back plate. J. Acoust. Soc. Am. 85, 476–480, 1989.

    Article  ADS  Google Scholar 

  2. Bergqvist, J. and Rudolf, F. A new condenser microphone in silicon. Sensors Actuators, A21–A23, 123–125, 1990.

    Article  Google Scholar 

  3. Sprenkels, A.J., Groothengel, R.A., Verloop A.J., and Bergveld, P. Development of an electret microphone in silicon. Sensor Actuators, 17(3&4), 509–512, 1989.

    Article  Google Scholar 

  4. van der Donk, A.G.H., Sprenkels, A.J., Olthuis, W., and Bergveld, P. Preliminary results of a silicon condenser microphone with internal feedback. In: Transducers’91. International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers, IEEE, New York, 1991, pp. 262–265.

    Google Scholar 

  5. Wong S.K. and Embleton T.F.W., eds. AIP Handbook of Condenser Microphones. AIP Press, New York, 1995.

    Google Scholar 

  6. Hellbaum, R.F. et al. An experimental fiber optic microphone for measurement of acoustic pressure levels in hostile environments. In: Sensors Expo Proceedings, Helmers Publishing, Peterborough, NH, 1991.

    Google Scholar 

  7. Piezo Film Sensors Technical Manual. Measurement Specialties, Inc., Norristown, PA, 1999; availabel at www.msiusa.com.

    Google Scholar 

  8. Nishikawa, S. and Nukijama, S. Proc. Imp. Acad. Tokyo 4, 290, 1928.

    Google Scholar 

  9. Sessler, G.M., ed. Electrets. Springer-Verlag. Berlin, 1980.

    Google Scholar 

  10. Morse, P.M. Vibration and Sound. McGraw-Hill, New York, 1948.

    Google Scholar 

  11. Griese, H.J., Proc. 9th International Conference on Acoustics, 1977, paper Q29.

    Google Scholar 

  12. Motamedi, M.E. and White, R.M. Acoustic sensors. In: Semiconductor Sensors. S. M. Sze, ed. John Wiley & Sons, New York, 1994, pp. 97–151.

    Google Scholar 

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(2004). Acoustic Sensors. In: Handbook of Modern Sensors. Springer, New York, NY. https://doi.org/10.1007/0-387-21604-9_12

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  • DOI: https://doi.org/10.1007/0-387-21604-9_12

  • Publisher Name: Springer, New York, NY

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