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Interferometric Distance Sensors

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Optical Sensors and Microsystems

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© 2002 Kluwer Academic Publishers

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Minoni, U., Rovati, L., Docchio, F. (2002). Interferometric Distance Sensors. In: Martellucci, S., Chester, A.N., Mignani, A.G. (eds) Optical Sensors and Microsystems. Springer, Boston, MA. https://doi.org/10.1007/0-306-47099-3_2

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  • DOI: https://doi.org/10.1007/0-306-47099-3_2

  • Publisher Name: Springer, Boston, MA

  • Print ISBN: 978-0-306-46380-8

  • Online ISBN: 978-0-306-47099-8

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