Conclusion
We have described the state of the art of nonlocal electrodynamics of bounded discharge plasmas. We revived classical works on the anomalous skin effect to analyze peculiarities of the electromagnetic phenomena in weakly collisional ICPs. Our calculations corroborated nonmonotonic distributions of the electromagnetic fields and electron current density, the existence of negative power absorption, and other interesting phenomena recently observed in experiments. We have analyzed the effect of weak static magnetic fields on the penetration of rf fields into weakly-collisional ICPs.
The elaboration of nonlocal electrodynamics in bounded systems is important for the development of novel plasma reactors operating at gas pressures below 10 mTorr. Currently used models designed for collisional plasmas do not contain the nonlocal effects we have discussed. Our treatment was based on simple models. Further development of theory and numerical tools is required for simulation of practical devices.
This is a preview of subscription content, log in via an institution to check access.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
Preview
Unable to display preview. Download preview PDF.
References
E.M. Lifshitz and L.P. Pitaevskii, Physical Kinetics, Pergamon Press, Oxford, 1981.
A.N. Kondratenko, Field Penetration into Plasmas, Atomizdat, Moscow, 1979, in Russian.
I.M. Lifshits, M.Ya. Azbel’, and M.I. Kaganov, Electron Theory of Metals, Consultants Bureau, New York-London, 1973.
P.M. Platzman and P.A. Wolff, Waves and Interactions in Solid State Plasmas, Academic Press, New York, 1973.
R.A. Demirkhanov, I. Kadysh, and Yu.S. Khodyrev, Sov. Phys. JETP 19, 791 (1964).
E.S. Weibel, Phys. Fluids 10, 741 (1967).
V.I. Kolobov and D.J. Economou, Plasma Sources Sci. Technol. 6, 1 (1997).
M.M. Turner, Phys. Rev. Lett. 71, 1844 (1993).
N.S. Yoon, S.S. Kim, C.S. Chang, and D.-I. Choi, Phys. Rev. E. 54, 757 (1996).
I.P. Shkarofsky, T.W. Johnson, and M.P. Bachinski, The Particle Kinetics of the Plasmas, Addison-Wesley, Reading, 1966.
V.I. Kolobov and V.A. Godyak, IEEE Trans. Plasma Sci. 23, 503 (1995).
B.D. Fried and S.D. Conte, The Plasma Dispersion Function, Academic Press, New York, 1961.
K.N. Stepanov, Soviet Phys. JETP 36, 1035 (1959).
I. Holstein, Phys. Rev. 88, 1427 (1952).
V. Vahedi, M.A. Lieberman, G. DiPeso, T.D. Rognlien, and D. Hewett, J. Appl. Phys. 78, 1446 (1995).
R.H. Cohen and T.D. Rognlien, Plasma Sources Sci. Technol. 5, 442 (1996).
Yu.S. Sayasov, Helvetica Physica Acta 52, 288 (1979).
P.M. Platzman and S.J. Buchsbaum, Phys. Rev. 128, 1004 (1962).
V.A. Godyak, Electron kinetics and electrodynamic characteristics of ICP in stochastic heating regime, in Electron Kinetics in Glow Discharges, edited by U. Kortschagen and L.D. Tsendin, Plenum Press, Inc., New York, 1997.
H.A. Blevin, J.A. Reynolds, and P. Thonemann, Phys. Fluids 13, 1259 (1970).
H.A. Blevin, J.A. Reinolds, and P.C. Thonemann, Phys. Fluids 16, 82 (1973).
S.M. Dikman and B.E. Meierovich, Soviet Physics JETP 37, 835 (1973).
H.U. Eckert, The hundred year history of induction discharges, in Proc. 2nd Int Conf on Plasma Chem Technol., edited by H.V. Boenig, Lancaster, Pennsylvania, 1986, Technomic Publishing Company, Inc.
B. Joye and H. Schneider, Helvetica Physica Acta 51, 804 (1978).
H.A. Blevin, J.M. Greene, D.L. Jolly, and R.G. Storer, J. Plasma Phys. 10, 337 (1973).
R.G. Storer, Phys. Fluids 16, 949 (1973).
B.E. Meierovich, Soviet Physics JETP 10, 782 (1970).
A.I. Kondratenko, Soviet Physics-Technical Physics 17, 584 (1972).
N.S. Yoon, S.M. Hwang, and D.-I. Choi, Phys. Rev. E 55, 7536 (1997).
H.-J. Lee, I.-D. Yang, and K.-W. Whang, Plasma Sources Sci. Technol. 5, 383 (1996).
B.M. Harvey and C.N. Lashmore-Davies, Phys. Fluids B 5, 3864 (1993).
K.P. Shamrai, V.P. Pavlenko, and V.B. Taranov, Plasma Phys. Control. Fusion 39, 505 (1997).
I. D. Kaganovich, V.I. Kolobov, and L.D. Tsendin, Appl. Phys. Lett. 69, 3818 (1996).
V.I. Kolobov, D.P. Lymberopoulos, and D.J. Economou, Phys. Rev. E 55, 3408 (1997).
M. Tuszewski, Phys. Rev. Lett. 77, 1286 (1996).
Author information
Authors and Affiliations
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 2002 Kluwer Academic Publishers
About this chapter
Cite this chapter
Kolobov, V. (2002). The Anomalous Skin Effect in Bounded Systems. In: Kortshagen, U., Tsendin, L.D. (eds) Electron Kinetics and Applications of Glow Discharges. NATO Science Series: B, vol 367. Springer, Boston, MA. https://doi.org/10.1007/0-306-47076-4_18
Download citation
DOI: https://doi.org/10.1007/0-306-47076-4_18
Publisher Name: Springer, Boston, MA
Print ISBN: 978-0-306-45822-4
Online ISBN: 978-0-306-47076-9
eBook Packages: Springer Book Archive