Skip to main content

Abstract

The Coordinate Measuring Machines (CMMs) are widely used for the three-dimensional measurements of workpieces. For solving the limits and the drawbacks of the traditional CMMs, we have started developing nano-CMM that measures three dimensional parts in nanometer resolution. In this article, we evaluate the repeatability and the straightness of stages of nano-CMM.

This is a preview of subscription content, log in via an institution to check access.

Access this chapter

Chapter
USD 29.95
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
eBook
USD 169.00
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
Softcover Book
USD 219.99
Price excludes VAT (USA)
  • Compact, lightweight edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info
Hardcover Book
USD 219.99
Price excludes VAT (USA)
  • Durable hardcover edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Purchases are for personal use only

Institutional subscriptions

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

References

  1. K. Takamasu, S. Ozawa, T. Asano, A. Suzuki, R. Furutani and S. Qzono, Basic Concepts of Nano CMM(Coordinate Measuring Machine with Nanometer Resolution), Jpn.-China Bilateral Symp. on Advanced Manufacturing Eng., 1996, 155

    Google Scholar 

Download references

Author information

Authors and Affiliations

Authors

Editor information

Editors and Affiliations

Rights and permissions

Reprints and permissions

Copyright information

© 2002 Kluwer Academic Publishers

About this chapter

Cite this chapter

Fujiwara, M., Yamaguchi, A., Takamasu, K., Ozono, S. (2002). Evaluation of Stages of Nano-CMM. In: Inasaki, I. (eds) Initiatives of Precision Engineering at the Beginning of a Millennium. Springer, Boston, MA. https://doi.org/10.1007/0-306-47000-4_124

Download citation

  • DOI: https://doi.org/10.1007/0-306-47000-4_124

  • Publisher Name: Springer, Boston, MA

  • Print ISBN: 978-0-7923-7414-5

  • Online ISBN: 978-0-306-47000-4

  • eBook Packages: Springer Book Archive

Publish with us

Policies and ethics