Abstract
The Coordinate Measuring Machines (CMMs) are widely used for the three-dimensional measurements of workpieces. For solving the limits and the drawbacks of the traditional CMMs, we have started developing nano-CMM that measures three dimensional parts in nanometer resolution. In this article, we evaluate the repeatability and the straightness of stages of nano-CMM.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
Preview
Unable to display preview. Download preview PDF.
References
K. Takamasu, S. Ozawa, T. Asano, A. Suzuki, R. Furutani and S. Qzono, Basic Concepts of Nano CMM(Coordinate Measuring Machine with Nanometer Resolution), Jpn.-China Bilateral Symp. on Advanced Manufacturing Eng., 1996, 155
Author information
Authors and Affiliations
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 2002 Kluwer Academic Publishers
About this chapter
Cite this chapter
Fujiwara, M., Yamaguchi, A., Takamasu, K., Ozono, S. (2002). Evaluation of Stages of Nano-CMM. In: Inasaki, I. (eds) Initiatives of Precision Engineering at the Beginning of a Millennium. Springer, Boston, MA. https://doi.org/10.1007/0-306-47000-4_124
Download citation
DOI: https://doi.org/10.1007/0-306-47000-4_124
Publisher Name: Springer, Boston, MA
Print ISBN: 978-0-7923-7414-5
Online ISBN: 978-0-306-47000-4
eBook Packages: Springer Book Archive