Abstract
Techniques and procedures are described for measuring strain on thin polysilicon films by laser interferometry. Tiny gold lines serve as the gage markers, and strains have been measured on films as thin as 1.5 micron. Biaxial strains can also be measured to determine Poisson’s ratio along with Young’s modulus.
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References
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Sharpe, W. N., Jr., Yuan, B., Edwards, R. L., and Vaidyanathan, R., “Measurements of Young’s modulus, Poisson’s ratio, and Tensile Strength of Polysilicon”, Proceedings of the Tenth IEEE International Workshop on Microelectromechanical Systems, Nagoya, Japan pp. 424–429 (1997).
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© 2000 Kluwer Academic Publishers
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Sharpe, W.N. (2000). Optical Measurement of Strain on Thin-film Polysilicon Tensile Specimens. In: Lagarde, A. (eds) IUTAM Symposium on Advanced Optical Methods and Applications in Solid Mechanics. Solid Mechanics and its Applications, vol 82. Springer, Dordrecht. https://doi.org/10.1007/0-306-46948-0_15
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DOI: https://doi.org/10.1007/0-306-46948-0_15
Publisher Name: Springer, Dordrecht
Print ISBN: 978-0-7923-6604-1
Online ISBN: 978-0-306-46948-0
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