Design and Optimization of MEMS Piezoelectric Cantilever for Vibration Energy Harvesting Application
This paper presents a reverse trapezoidal unimorph piezoelectric cantilever structure for frequency tuning and power optimization. A proof mass is incorporated at the upper side of the free end of the cantilever. The proposed cantilever structure with nonconventional geometry finds its application in vibration energy harvesting. The design is simulated with COMSOL Multiphysics 5.2 to convert mechanical energy into electrical energy. The proposed harvester is able to generate 1300 \(\upmu \)m displacement, 0.46V induced voltage, and 9 \(\upmu \)W induced electrical peak power at the low frequency of about 160 Hz at applied 1 g acceleration and 12 k\(\Omega \) optimal load resistance.
KeywordsMEMS Piezoelectric material Cantilever Sensors
The authors thank Visvesvaraya National Institute of Technology, Nagpur for giving support of simulating design in COMSOL Multiphysics software.
- 6.Soliman, M., El-Saadany, E., Abdel-Rahman, E., Mansour, R.: Design and modeling of a wideband mems-based energy harvester with experimental verification. In: Microsystems and Nanoelectronics Research Conference. MNRC 2008, 1st edn. pp. 193–196. IEEE (2008)Google Scholar