Fabrication of an Adaptive Micro Fresnel Mirror Array

  • Binal P. BrunoEmail author
  • Ruediger Grunwald
  • Ulrike Wallrabe
Conference paper
Part of the Springer Proceedings in Physics book series (SPPHY, volume 233)


We present in this paper the design and fabrication of a miniaturized array of piezoelectrically tunable Fresnel mirrors, which can be used to generate propagation invariant and self-healing interference pattern. The mirrors are actuated using a circular piezoelectric actuator, and the resulting change in the tilting angles of the mirrors changes the widths of the interference patterns generated. The array consists of four Fresnel mirrors arranged in 2 × 2 configuration with each mirror having an area of 2 × 2 mm2. The achievable mirror angle ranges from −10 to +10 mrad.



This work was supported by Deutsche Forschungsgemeinschaft (DFG) within grant no. WA1657/3-2.


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Copyright information

© Springer Nature Singapore Pte Ltd. 2019

Authors and Affiliations

  • Binal P. Bruno
    • 1
    Email author
  • Ruediger Grunwald
    • 2
  • Ulrike Wallrabe
    • 1
  1. 1.Laboratory for Microactuators, Department of Microsystems EngineeringUniversity of FreiburgFreiburgGermany
  2. 2.Max-Born-Institute for Nonlinear Optics and Short Pulse SpectroscopyBerlinGermany

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