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Bandwidth Enhancement in MEMS-Based Energy Harvester for Cochlear Implants

  • Ayesha Akhtar
  • Neela Chattoraj
  • Sudip Kundu
Conference paper
  • 49 Downloads
Part of the Lecture Notes in Mechanical Engineering book series (LNME)

Abstract

In this paper, a MEMS piezoelectric energy harvester is designed to convert vibrational energy in the range of 150–230 Hz into electric energy using piezoelectric effect for cochlear implants. The simulation is done in COMSOL Multiphysics. The comparison of different MEMS structures has been done with the same piezoelectric material, ZnO. The thickness of the piezoelectric material is kept constant in all the three structures which are equal to 2 µm. The single cantilever beam structure with a silicon anchor is designed which consist of four layers, namely silicon substrate, electrodes layer, and a piezoelectric layer. A sinusoidal acceleration of 0.1g is applied to three structures which are preferred for the proposed structure. The objective of this paper is to get lower resonant frequency, high output voltage, and larger bandwidth. The performance analysis is carried by considering the different designs of cantilever structures on the same substrate.

Keywords

MEMS Piezoelectric energy harvester Cochlear implants ZnO 

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Copyright information

© Springer Nature Singapore Pte Ltd. 2020

Authors and Affiliations

  • Ayesha Akhtar
    • 1
  • Neela Chattoraj
    • 1
  • Sudip Kundu
    • 1
  1. 1.Department of Electronics & Communication EngineeringBirla Institute of TechnologyRanchiIndia

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