Bandwidth Enhancement in MEMS-Based Energy Harvester for Cochlear Implants

  • Ayesha Akhtar
  • Neela Chattoraj
  • Sudip Kundu
Conference paper
Part of the Lecture Notes in Mechanical Engineering book series (LNME)


In this paper, a MEMS piezoelectric energy harvester is designed to convert vibrational energy in the range of 150–230 Hz into electric energy using piezoelectric effect for cochlear implants. The simulation is done in COMSOL Multiphysics. The comparison of different MEMS structures has been done with the same piezoelectric material, ZnO. The thickness of the piezoelectric material is kept constant in all the three structures which are equal to 2 µm. The single cantilever beam structure with a silicon anchor is designed which consist of four layers, namely silicon substrate, electrodes layer, and a piezoelectric layer. A sinusoidal acceleration of 0.1g is applied to three structures which are preferred for the proposed structure. The objective of this paper is to get lower resonant frequency, high output voltage, and larger bandwidth. The performance analysis is carried by considering the different designs of cantilever structures on the same substrate.


MEMS Piezoelectric energy harvester Cochlear implants ZnO 


  1. 1.
    Galchev TV, McCullagh J, Peterson RL, Najafi K (2011) Harvesting traffic-induced vibrations for structural health monitoring of bridges. J Micromech Microeng 21(10):104005CrossRefGoogle Scholar
  2. 2.
    Kim SG, Priya S, Kanno I (2012) Piezoelectric MEMS for energy harvesting. MRS Bull 37(11):1039–1050CrossRefGoogle Scholar
  3. 3.
    Priya S, Inman DJ (eds) (2009) Energy harvesting technologies. Springer, New YorkGoogle Scholar
  4. 4.
    Beker L (2013) MEMS Piezoelectric Energy Harvester for Cochlear Implant Applications. M. Tech Thesis, Middle East Technical UniversityGoogle Scholar
  5. 5.
    Alrashdan MH, Majlis BY, Hamzah AA, Marsi N (2013) Design and simulation of piezoelectric micro power harvester for capturing acoustic vibrations. In: IEEE regional symposium on micro and nanoelectronics, pp 383–386Google Scholar
  6. 6.
    Chaudhuri D, Kundu S, Chattoraj N (2017) Harvesting energy with zinc oxide bio-compatible piezoelectric material for powering cochlear implants. In: Innovations in power and advanced computing technologies (i-PACT), pp 1–5Google Scholar
  7. 7.
    Bindu RS, Kushal MP, Potdar M (2014) Study of piezoelectric cantilever energy harvesters. Int J Innov Res Dev, 2278-021Google Scholar
  8. 8.
    Nagayasamy N, Gandhimathination S, Veerasamy V (2013) The effect of ZnO thin film and its structural and optical properties prepared by sol-gel spin coating method. Open J Metal 3(02):8CrossRefGoogle Scholar
  9. 9.
    Xue H, Hu Y, Wang QM (2008) Broadband piezoelectric energy harvesting devices using multiple bimorphs with different operating frequencies. IEEE Trans Ultrason Ferroelectr Freq Control 55(9):2104–2108CrossRefGoogle Scholar
  10. 10.
    Roundy S, Wright PK, Rabaey JM (2003) Energy scavenging for wireless sensor networks. Norwell, 45–47Google Scholar
  11. 11.
    Shen Z, Liu S, Miao J, Woh LS, Wang Z (2013) Proof mass effects on spiral electrode d 33 mode piezoelectric diaphragm-based energy harvester. In: IEEE 26th international conference on micro electro mechanical systems (MEMS), pp 821–824Google Scholar

Copyright information

© Springer Nature Singapore Pte Ltd. 2020

Authors and Affiliations

  • Ayesha Akhtar
    • 1
  • Neela Chattoraj
    • 1
  • Sudip Kundu
    • 1
  1. 1.Department of Electronics & Communication EngineeringBirla Institute of TechnologyRanchiIndia

Personalised recommendations