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Pattern Transfer for Laser Heat-Mode Lithography

  • Jingsong WeiEmail author
Chapter
Part of the Springer Series in Materials Science book series (SSMATERIALS, volume 291)

Abstract

Laser heat-mode lithography is useful for obtaining arbitrary micro/nanostructures on the heat-mode resist thin films. In real applications, the micro/nanostructures need to be further transferred to the substrates, such as silicon, quartz, or sapphires. The optical/electronic elements and devices can be also obtained through the pattern transfer techniques.

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Copyright information

© Springer Nature Singapore Pte Ltd. 2019

Authors and Affiliations

  1. 1.Shanghai Institute of Optics and Fine MechanicsChinese Academy of SciencesShanghaiChina

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