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Current Status of Lithography

  • Jingsong WeiEmail author
Chapter
First Online:
Part of the Springer Series in Materials Science book series (SSMATERIALS, volume 291)

Abstract

Lithography is one of the critical processes used for the fabrication of microelectronic chips and micro/nanostructure-based electro-optical devices. The pattern structures are usually fabricated on the resist thin films and then transferred to the silicon or fused quartz substrates through the exposure and etching techniques.

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© Springer Nature Singapore Pte Ltd. 2019

Authors and Affiliations

  1. 1.Shanghai Institute of Optics and Fine MechanicsChinese Academy of SciencesShanghaiChina

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