Heterogeneous Integrations on Silicon Substrates (Bridges)

  • John H. LauEmail author


Through-silicon via (TSV)-interposer is very expensive [1, 2, 3, 4, 5, 6, 7, 8, 9, 10]. Silicon bridges are one form of silicon substrates to support heterogeneous integrations. Basically, a bridge is a piece of dummy silicon with RDLs (redistribution-layers) and contact pads, but without TSVs (through-silicon vias), i.e., a TSV-less interposer. Usually, the RDLs and contact pads are fabricated on a dummy silicon wafer and then diced into individual bridges. In this chapter, the fabrication of Intel’s EMIB (embedded multi-die interconnect bridge) [11, 12, 13] will be mentioned. Also, imec’s bridges [14] for the communications of heterogeneous integrations will be briefly discussed. Finally, ITRI’s TSH (through-silicon hole) interposer (bridge) [15, 16, 17, 18] will be presented.


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© Springer Nature Singapore Pte Ltd. 2019

Authors and Affiliations

  1. 1.ASM Pacific TechnologyHong KongHong Kong

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