Modelling of Piezoelectric MEMS in Biomedical Applications
The article provides to the reader a brief of the piezoelectric materials characteristics and their possibilities in biomedical microdevices development. The first section of this article presents the basics of piezoelectric MEMS. The research is focused on microgrippers since this technology is widely used in biomedical applications. The second section of this article present a review of both the direct and inverse piezoelectric effects and the piezoelectric coupling formulation used for modelling biomedical microgrippers. An analysis of piezoelectric gripper based on finite-element calculations is presented in which the fundamental electroelastic equations governing piezoelectric media are solved numerically. A study on how different geometries, different piezoelectric materials and even different mesh densities influences the performances of the microgripper are described in the last section of this article. The experimental results confirm their efficiency and demonstrate that the piezoelectric microgrippers are well suited in biomedical applications.
KeywordsMEMS Piezoelectric devices Micro grippers Biomedical applications
The research activities were supported through an UTCN internal grant CI2017, Nr. 1989/12.07.2017.
Conflict of Interest
The authors declare that they have no conflict of interest.
- 1.Vijaya, M.S.: Piezoelectric Materials and Devices, Applications in Engineering and Medical Sciences, CRC Press, Taylor & Francis Group, LLC (2013)Google Scholar
- 2.Ye, X., Zhang Z.-J., Sun, Y. Wang, Q.: A Bi-morph Piezoelectric Ceramic Microgripper Integrating Micro-force Detecting and Feedback. School of Mechanical Engineering, Beijing Institute of Technology, Beijing, ChinaGoogle Scholar
- 4.von Buren, T., Mitcheson, P.D., Green, T.C., Yeatman, E.M., Holmes, A.S., Troster, G.: Optimization of inertial micropower generators for human walking motion. IEEE Sens. J. 6, 28–38 (2006)Google Scholar
- 5.Popovici, D., Constantinescu, F., Maricaru, M. et al.: Modeling and Simulation of Piezoelectric Devices, Modelling and Simulation. InTech (2008)Google Scholar
- 6.Tebrean, B., Crisan, S., Muresan, C., Crisan, T.E.: Low cost command and control system for automated infusion devices. In: International Conference on Advancements of Medicine and Health Care Through Technology, October 2016, Cluj-Napoca, Romania (2016)Google Scholar
- 7.Crisan, S., Tarnovan, I.G., Tebrean, B., Crisan, T.E.: Optical multi-touch system for patient monitoring and medical data analysis. In: International Conference on Advancements of Medicine and Health Care Through Technology, vol. 26, pp. 279–282 (2009)Google Scholar