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Increase the IQE by Improving the Crystalline Quality for DUV LEDs

  • Zi-Hui ZhangEmail author
  • Chunshuang Chu
  • Kangkai Tian
  • Yonghui Zhang
Chapter
Part of the SpringerBriefs in Applied Sciences and Technology book series (BRIEFSAPPLSCIENCES)

Abstract

The roadmap for AlGaN based DUV LEDs is similar to that for InGaN based visible LEDs, such that the success of achieving high crystalline-quality epilayers is the precondition for fabricating high-brightness DUV LEDs. This chapter will review the most adopted technologies for growing high-quality Al-rich AlGaN films, which is regarded as the milestone for making high-efficiency DUV LEDs.

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Copyright information

© The Author(s), under exclusive license to Springer Nature Singapore Pte Ltd. 2019

Authors and Affiliations

  • Zi-Hui Zhang
    • 1
    Email author
  • Chunshuang Chu
    • 1
  • Kangkai Tian
    • 1
  • Yonghui Zhang
    • 1
  1. 1.School of Electronics and Information Engineering, Institute of Micro-Nano Photoelectron and Electromagnetic Technology InnovationHebei University of TechnologyTianjinChina

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