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Development of a Controlled In Situ Thin-Film Technology for Porous Anodic Alumina-Based Nanostructures

  • T. LebyedyevaEmail author
  • I. Frolov
  • M. Skoryk
  • P. Shpylovyy
Conference paper
Part of the Lecture Notes in Mechanical Engineering book series (LNME)

Abstract

This work is aimed at development of the technology of thin-film porous anodic alumina/aluminum (PAA/Al) structures for optical sensors based on metal-clad waveguides and Al nanomesh films for transparent conductive layers. The method of optical control directly in the process of the structures formation which consists in monitoring of the angular dependence of monochromatic light reflection was used both for the formation of the PAA/Al structures by anodic oxidation, for the widening of pores by wet etching, as well to control the etching of the PAA and monitoring the remaining Al nanomesh.

Keywords

Aluminum thin films Magnetron sputtering Anodic oxidation Porous anodic alumina Al nanomesh In-situ monitoring Reflective curves 

References

  1. 1.
    Losic D, Santos A (2015) Nanoporous alumina: fabrication, structure, properties, and applications. Springer, HeidelbergGoogle Scholar
  2. 2.
    Masuda H, Fukuda K (1995) Ordered metal nanohole arrays made by a two-step replication of honeycomb structures of anodic alumina. Science 268(5216):1466–1468Google Scholar
  3. 3.
    Lei Y, Cai W, Wilde G (2007) Highly ordered nanostructures with tunable size, shape, and properties: a new way to surface nano-patterning using ultra-thin alumina masks. Prog Mater Sci 52:465–539Google Scholar
  4. 4.
    Wang C, Tanaka S, Saito K, Shimizu T, Shingubara S (2014) Fabrication of ordered arrays of anodic aluminum oxide pores with interpore distance smaller than the pitch of nano-pits formed by ion beam etching. J Mater Sci Nanotech 1(1):1–6Google Scholar
  5. 5.
    Yasui K, Nishio K, Nunokawa H, Masuda H (2005) Ideally ordered anodic porous alumina with sub-50 nm hole intervals based on imprinting using metal molds. J Vac Sci Technol B.  https://doi.org/10.1116/1.1941247Google Scholar
  6. 6.
    Santos A, Kumeria T, Losic D (2014) Nanoporous anodic alumina: a versatile platform for optical biosensors. Materials 7:4297–4320Google Scholar
  7. 7.
    Biednov M, Lebyedyeva T, Shpylovyy P (2015) Gold and aluminum based surface plasmon resonance biosensors: sensitivity enhancement. Proceedings of the SPIE 9506 optical sensors.  https://doi.org/10.1117/12.2177992
  8. 8.
    Hotta K, Yamaguchi A, Teramae N (2010) Properties of a metal clad waveguide sensor based on a nanoporous-metal-oxide/metal multilayer film. Anal Chem 82(14):6066–6073Google Scholar
  9. 9.
    Voitovich I, Lebyedyeva T, Rachkov O, Gorbatiuk O, Shpylovyy P. Anodic alumina-based nanoporous coatings for sensory applications. In: Fesenko O, Yatsenko L (eds) Nanoplasmonics, nano-optics, nanocomposites, and surface studies. Springer, Heidelberg, p 423Google Scholar
  10. 10.
    Li Y, Chen Y, Qiu M, Yu H, Zhang X, Sun X, Chen R (2016) Preparation of aluminum nanomesh thin films from an anodic aluminum oxide template as transparent conductive electrodes. Sci Rep 6:20114.  https://doi.org/10.1038/srep20114Google Scholar
  11. 11.
    Hubarevich A, Marus M, Stsiapanau A, Smirnov A, Zhao J, Fan W, Wang H, Sun X (2015) Transparent conductive nanoporous aluminum mesh prepared by electrochemical anodizing. Phys Status Solidi A Appl Mater Sci 212(10):2174–2178Google Scholar
  12. 12.
    Ottone C, Laurenti M, Bejtka K, Cauda V (2014) Effects of the Film thickness and roughness in the anodization process of very thin aluminum films. J Mater Sci Nanotech 1(1):1–9Google Scholar
  13. 13.
    Lebyedyeva T, Kryvyi S, Lytvyn P, Skoryk M, Shpylovyy P (2016) Formation of nanoporous anodic alumina by anodization of aluminum films on glass substrates. Nanoscale Res Lett 11(203):1–11Google Scholar
  14. 14.
    Lita A, Sanchez JE (1999) Characterization of surface structure in sputtered Al films: correlation to microstructure evolution. J Appl Phys 85(2):876–882Google Scholar
  15. 15.
    Lubenchencko A, Afanas’ev V, Lukashevsky M, Norell M, Pavolotsky A, Fedorovich S (2008) Study of Nb/Al interface combining spectroscopy of reflected electrons with ion sputtering. J Phys Conf Ser 97(1):1–6Google Scholar
  16. 16.
    Mozalev A, Sakairi M, Saeki I, Takahashi H (2003) Nucleation and growth of the nanostructured anodic oxides on tantalum and niobium under the porous alumina film. Electrochem Acta 48(20):3155–3170Google Scholar

Copyright information

© Springer Nature Singapore Pte Ltd. 2019

Authors and Affiliations

  • T. Lebyedyeva
    • 1
    Email author
  • I. Frolov
    • 1
  • M. Skoryk
    • 2
  • P. Shpylovyy
    • 1
  1. 1.Department of Sensory DevicesSystems and Technologies of Noncontact Diagnostics, V.M. Glushkov Institute of Cybernetics, NAS of UkraineKievUkraine
  2. 2.NanoMedTech LLCKievUkraine

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