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Fabrication, Characterization and Parameter Extraction of InAs Nanowire-Based Device

  • Mengqi FuEmail author
Chapter
Part of the Springer Theses book series (Springer Theses)

Abstract

Nanofabrication, low noise electrical measurement and various nanoscale characterization methods are frequently used in the study. This chapter will give as introduction on the growth method, fabrication techniques, characterization methods of materials and devices, measurement systems, and way to extract the electrical parameters of InAs nanowires FET devices.

Keywords

Fabrication of nanowire devices Electrical measurement Parameter extraction Structural characterization  

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Copyright information

© Springer Nature Singapore Pte Ltd. 2018

Authors and Affiliations

  1. 1.Department of PhysicsUniversity of KonstanzKonstanzGermany

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