Guide to Silicon-Based Materials

Tatsuya Shimoda

doi:10.1007/978-981-13-2953-1_2

Nanoliquid Processes for Electronic Devices pp 15-19 | Cite as

Guide to Silicon-Based Materials

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Tatsuya Shimoda

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First Online: 06 February 2019

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Abstract

This chapter is a guidance of the materials and processes related to liquid silicon. Each topic is introduced from chapter to chapter based on the process flow shown in Fig. 2.2. The intestine terms are liquid silicon family materials (LSFMs), which are an assembly of the required materials to fabricate MOSFET base on the liquid process. Most of them can be synthesized by using cyclopentasilane (CPS).

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Liquid silicon Cyclopentasilane (CPS) Silicon ink Polysilane Liquid vapor deposition

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Tatsuya Shimoda
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1.Japan Advanced Institute of Science and TechnologyNomiJapan

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Cite this chapter as:: Shimoda T. (2019) Guide to Silicon-Based Materials. In: Nanoliquid Processes for Electronic Devices. Springer, Singapore

First Online 06 February 2019
DOI https://doi.org/10.1007/978-981-13-2953-1_2
Publisher Name Springer, Singapore
Print ISBN 978-981-13-2952-4
Online ISBN 978-981-13-2953-1
eBook Packages Chemistry and Materials Science

Guide to Silicon-Based Materials

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