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A New Design for Secondary Electron Measurement and Application

  • Jinhai Li
  • Shulin Liu
  • Baojun Yan
Conference paper
Part of the Springer Proceedings in Physics book series (SPPHY, volume 213)

Abstract

The secondary electron is researched in many fields. In order to measure the secondary electron angular distribution of all the solid angle, the X axis support and Y axis support are proposed. The energy distribution of the secondary electron also can be measured. The accumulated charge on the insulated material surface during the secondary electron measurement has very bad effects. Although many methods have been used for the charge neutralization, many defects are still not resolved. So the plasma neutralization is proposed. The plasma neutralization can also be used in the electron microscopy.

Keywords

Secondary electron Angular distribution Energy distribution Charge neutralization Electron microscopy 

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Copyright information

© Springer Nature Singapore Pte Ltd.  2018

Authors and Affiliations

  1. 1.China Institute of Atomic EnergyBeijingChina
  2. 2.Institute of High Energy PhysicsChinese Academy of SciencesBeijingChina

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