Spherical Measuring Device of Secondary Electron Emission Coefficient Based on Pulsed Electron Beam
In order to improve the performance of the microchannel plate, a material having a high secondary electron emission coefficient (SEEC) is required, and the SEEC of this material needs to be accurately measured. For this purpose, a SEEC measuring device with spherical collector structure was designed. The device consists of vacuum system, electron gun, main chamber, sample stage, test system and test software. The measurement of the SEEC from a wide incident energy range (100 eV–10 keV) and a large incident angle (0°–85°) is realized by using the pulsed electron beam as the incident electron. The energy distribution of the secondary electrons is measured by a multi-layer grid structure. The SEEC of the metallic material was tested by using this device, which proves that the device is stable and good.
KeywordsSecondary electron emission coefficient Measuring device Sample charging
This work is supported by the National Natural Science Foundation of China (Grant Nos. 11675278 and 11535014), Beijing Municipal Science and Technology Project (Grant No. Z171100002817004) and the Equipment Development Program of the Chinese Academy of Sciences.
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