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Spherical Measuring Device of Secondary Electron Emission Coefficient Based on Pulsed Electron Beam

  • Kaile Wen
  • Shulin Liu
  • Baojun Yan
  • Yang Yu
  • Yuzhen Yang
Conference paper
Part of the Springer Proceedings in Physics book series (SPPHY, volume 212)

Abstract

In order to improve the performance of the microchannel plate, a material having a high secondary electron emission coefficient (SEEC) is required, and the SEEC of this material needs to be accurately measured. For this purpose, a SEEC measuring device with spherical collector structure was designed. The device consists of vacuum system, electron gun, main chamber, sample stage, test system and test software. The measurement of the SEEC from a wide incident energy range (100 eV–10 keV) and a large incident angle (0°–85°) is realized by using the pulsed electron beam as the incident electron. The energy distribution of the secondary electrons is measured by a multi-layer grid structure. The SEEC of the metallic material was tested by using this device, which proves that the device is stable and good.

Keywords

Secondary electron emission coefficient Measuring device Sample charging 

Notes

Acknowledgement

This work is supported by the National Natural Science Foundation of China (Grant Nos. 11675278 and 11535014), Beijing Municipal Science and Technology Project (Grant No. Z171100002817004) and the Equipment Development Program of the Chinese Academy of Sciences.

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Copyright information

© Springer Nature Singapore Pte Ltd. 2018

Authors and Affiliations

  1. 1.State Key Laboratory of Particle Detection and ElectronicsInstitute of High Energy Physics of Chinese Academy of SciencesBeijingChina
  2. 2.University of Chinese Academy of SciencesBeijingChina
  3. 3.Department of Applied Physics, School of ScienceXi’an University of TechnologyXi’anChina
  4. 4.School of PhysicsNanjing UniversityNanjingChina

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