Abstract
Micro-electromechanical systems (MEMS) have tremendous applications in the field of biomedical and chemical sensors. There are different readout techniques like piezo-resistive and piezo-electric which are used to measure the stimuli absorbed by the cantilever into electrical signals. In this paper, we used the open-source Ptolemy software to model MOEMS sensor with novel optical read out. To enhance the deflection and sensitivity, four micro-mass optical MEMS sensor models were developed using four different shapes of the cantilever. The detectable mass range measured by the triangular cantilever using parylene as material is 50.97 μg–23.996 mg.
This is a preview of subscription content, log in via an institution to check access.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
References
P.G. Waggoner, H.G. Craighead, Micro- and nanomechanical sensors for environmental, chemical, and biological detection. Lab Chip 7(10), 1238–1255 (2007)
A. Gupta, D. Akin, R. Bashir, Single virus particle mass detection using microresonators with nanoscale thickness. Appl. Phys. Lett. 84(11), 1976–1978 (2004)
M.Z. Ansari, C. Cho, J. Kim, B. Bang, Comparison between deflection and vibration characteristics of rectangular and trapezoidal profile microcantilevers. Sensors 9, 2706–2718 (2009)
H.F. Hawari, Y. Wahab, M.T. Azmi, A.Y. Shakaff, U. Hashim, S. Johari, Design and analysis of various microcantilever shapes for MEMS based sensing. J. Phys. Conf. Ser. 495, 1–9 (2014)
M. Abdel-Jaber, A. Al-Qaisia, M.S. Abdel-Jaber, Nonlinear natural frequencies of a tapered cantilever beam. Advanc. Steel Construct. 5, 259–272 (2009)
S. Morshed, B.C. Prorok, Tailoring beam mechanics towards enhancing detection of hazardous biological species. Experiment. Mech. 47, 405–415 (2007)
K. Yang, Z. Li, D. Chen, Design and fabrication of a novel T shaped piezoelectric ZnO cantilever sensor. Active Passive Electron. Comp. 2012, Article ID 834961, 7 (2012)
M.Z. Ansari, C. Cho, Design and analysis of a high sensitive microcantilever biosensor for biomedical applications, in International Conference on Biomedical Engineering and Informatics (2008)
D.K. Parsediya, J. Singh, P.K. Kankar, Simulation and analysis of highly sensitive MEMS cantilever designs for “in vivo label free” biosensing. Proc. Technol. 14, 85–92 (2014)
V. Gulshan Thakare, A. Nage, Design and analysis of high sensitive biosensor using MEMS. Int. J. Innovat. Sci. Eng. Technol. 2(6), 697–701 (2015)
V. Mounika Reddy, G.V. Sunil Kumar, Design and analysis of microcantilevers with various shapes using COMSOL multiphysics software. Int. J. Emerg. Technol. Advanc. Eng. 3(3), 294–299 (2013)
M. Chaudhary, A. Gupta, Microcantilever-based sensors. Defence Sci. J. 59(6), 634–641 (2009)
C. Ptolemaeus, System, Modeling and Simulation Using Ptolemy II, Creative Commons. California, p. 10 (2014)
C. Brooks, E.A. Lee, X. Liu et al. Heterogeneous Concurrent Modeling and Design in Java. Technical Memorandum UCB/ERL M04/27, University of California, Berkeley
I. Mala Serene, M. Rajasekhara Babu, Z.C. Alex, Optical MEMS sensor for measurement of low stress using Ptolemy II. Advanc. Syst. Sci. Appl. 16(3), 76–93 (2016)
J.A. Hoffman, T. Wertheimer, Cantilever beam vibrations. J. Sound Vibrat. 229(5), 1269–1276 (2000)
Author information
Authors and Affiliations
Rights and permissions
Copyright information
© 2019 The Author(s), under exclusive licence to Springer Nature Singapore Pte Ltd.
About this chapter
Cite this chapter
Serene, M., Babu, R., Alex, Z.C. (2019). Sensitivity Analysis of Micro-Mass Optical MEMS Sensor for Biomedical IoT Devices. In: Internet of Things and Personalized Healthcare Systems. SpringerBriefs in Applied Sciences and Technology(). Springer, Singapore. https://doi.org/10.1007/978-981-13-0866-6_1
Download citation
DOI: https://doi.org/10.1007/978-981-13-0866-6_1
Published:
Publisher Name: Springer, Singapore
Print ISBN: 978-981-13-0865-9
Online ISBN: 978-981-13-0866-6
eBook Packages: Intelligent Technologies and RoboticsIntelligent Technologies and Robotics (R0)