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Scanning Electron Microscopy

  • Yasuyuki OkanoEmail author
Chapter

Abstract

Scanning electron microscope (SEM) is an instrument that can image and analyze specimens using a focused electron beam. When the focused electron beam irradiates a specimen, various signals are generated in consequence of the interaction of the incident electron with atoms in the specimen (Fig. 91.1) (Reimer in Scanning electron microscopy: physics of image formation and microanalysis. Springer Verlag, 1998 [1]). Among the signals generated from the surface of the specimen, secondary electrons (SEs) and backscattered electrons (BSEs) can be detected for observation of shape and composition (material contrast).

Keywords

Secondary electron Backscattered electron Shape information Composition information 

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Copyright information

© Springer Nature Singapore Pte Ltd. 2018

Authors and Affiliations

  1. 1.Advanced Technology Development Team, SM Research and Development DepartmentSM Business Unit, JEOL LtdTokyoJapan

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