Scanning Electron Microscope Energy Dispersive X-Ray Spectrometry

  • Masaki MoritaEmail author


SEM-EDS performs an elemental analysis on a material’s surface. The high-energy electron beam of the scanning electron microscope (SEM) interacts with the sample material and a characteristic X-ray is generated. Energy-dispersive X-ray spectrometer (EDS, EDXS) then detects the characteristic X-ray.


SEM-EDS X-ray analysis Elemental analysis Characteristic X-ray X-ray spectroscopy 


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© Springer Nature Singapore Pte Ltd. 2018

Authors and Affiliations

  1. 1.JEOL LtdTokyoJapan

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