Rutherford Backscattering Spectrometry
RBS is a method to determine the absolute elemental composition, usually of thin films (t ~ several tens or hundreds nm) deposited on substrates.
KeywordsRutherford scattering Ion beam analysis Electrostatic accelerator
- 1.Rutherford, E.: LXXIX. The scattering of α and β particles by matter and the structure of the atom, Philosophical Magazine Series 6, 21: 669–688, (1911)Google Scholar
- 2.Bragg, W.-H., Kleeman, R.: XXXIX. On the a particle of Radium, and their loss of range in passing through various atoms and molecules, Phil. Mag. Dec. 318–340, (1904)Google Scholar
- 3.For example, SIMNRA, (http://home.mpcdf.mpg.de/~mam/)
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