Medium-Energy Ion Scattering

  • Tomoaki NishimuraEmail author


Medium-energy ion scattering is a method to analyze energy of large-angle scattered ions from a sample using hydrogen or helium ion beam accelerated to about several hundred keV. Fast ions gradually lose their energy mainly due to interaction with electrons in the solid, and only a small portion of the incident ions are scattered in large angle by close collisions between the nuclei.


Surface atomic structure Surface composition Crystal structure Rumpling 


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    Sayan, S., Garfunkel, E., Nishimura, T., Schulte, W.H., Gustafsson, T.: Thermal decomposition behavior of the HfO2/SiO2/Si System. J. Appl. Phys. 94, 928–934 (2003)CrossRefGoogle Scholar
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    Nishimura, T.: Computer simulation program for medium-energy ion scattering and Rutherford backscattering spectrometry. Nucl. Instrum. Methods B 371, 97 (2016)CrossRefGoogle Scholar
  4. 4.
    Nishimura, T.: MEISwin program.

Copyright information

© Springer Nature Singapore Pte Ltd. 2018

Authors and Affiliations

  1. 1.Research Center of Ion Beam TechnologyHosei UniversityTokyoJapan

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