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Medium-Energy Ion Scattering

  • Tomoaki NishimuraEmail author
Chapter

Abstract

Medium-energy ion scattering is a method to analyze energy of large-angle scattered ions from a sample using hydrogen or helium ion beam accelerated to about several hundred keV. Fast ions gradually lose their energy mainly due to interaction with electrons in the solid, and only a small portion of the incident ions are scattered in large angle by close collisions between the nuclei.

Keywords

Surface atomic structure Surface composition Crystal structure Rumpling 

References

  1. 1.
    Copel, M., Gustafsson, T.: Structure of Au(110) determined with medium-energy-ion scattering. Phys. Rev. Lett. 57, 723–726 (1986)CrossRefGoogle Scholar
  2. 2.
    Sayan, S., Garfunkel, E., Nishimura, T., Schulte, W.H., Gustafsson, T.: Thermal decomposition behavior of the HfO2/SiO2/Si System. J. Appl. Phys. 94, 928–934 (2003)CrossRefGoogle Scholar
  3. 3.
    Nishimura, T.: Computer simulation program for medium-energy ion scattering and Rutherford backscattering spectrometry. Nucl. Instrum. Methods B 371, 97 (2016)CrossRefGoogle Scholar
  4. 4.
    Nishimura, T.: MEISwin program. http://www.ionbeam.hosei.ac.jp/en/software.html

Copyright information

© Springer Nature Singapore Pte Ltd. 2018

Authors and Affiliations

  1. 1.Research Center of Ion Beam TechnologyHosei UniversityTokyoJapan

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