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Low-Energy Electron Microscope

  • H. HibinoEmail author
Chapter

Abstract

Low-energy electron microscopy (LEEM) is a projection-type microscopy technique collecting low-energy (typically 1–100 eV) electrons backscattered from the samples for imaging [1].

Keywords

Low-energy electron diffraction Surface structure Surface dynamical process Thin film 

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Copyright information

© Springer Nature Singapore Pte Ltd. 2018

Authors and Affiliations

  1. 1.Kwansei Gakuin UniversitySandaJapan

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