Low-Energy Ion Scattering Spectroscopy

  • Kenji UmezawaEmail author


Low-energy ions scattering (less than 5 keV) is a powerful tool for the analysis of “first monolayer”.


Low-energy ion scattering Atomic collision Ultra-high vacuum 


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© Springer Nature Singapore Pte Ltd. 2018

Authors and Affiliations

  1. 1.Department of Physics, College of Integrated Arts SciencesOsaka Prefecture UniversitySakai, OsakaJapan

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