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High-Resolution Rutherford Backscattering Spectrometry

  • Kaoru NakajimaEmail author
Chapter

Abstract

High-resolution Rutherford backscattering spectrometry (HRBS) is an advanced type of Rutherford backscattering spectrometry (RBS), depth resolution of which is improved to sub-nm.

Keywords

Ion scattering Elemental composition Non-destructive depth profiling Sub-nm depth resolution 

References

  1. 1.
    Kimura, K., Mannami, M.: RBS with monolayer resolution. Nucl. Instr. Meth. B 113, 270–274 (1996)CrossRefGoogle Scholar
  2. 2.
    Nakajima, K., Joumori, S., Suzuki, M., Kimura, K., Osipowicz, T., Tok, K.L., Zheng, J.Z., See, A., Zhang, B.C.: Characterization of HfO2/Si(001) interface with high-resolution Rutherford backscattering spectroscopy. Appl. Surf. Sci. 237, 416–420 (2004)CrossRefGoogle Scholar

Copyright information

© Springer Nature Singapore Pte Ltd. 2018

Authors and Affiliations

  1. 1.Department of Micro Engineering, Graduate School of EngineeringKyoto UniversityKyotoJapan

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