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Focused Ion Beam Scanning Electron Microscope

  • Tetsuo SakamotoEmail author
Chapter

Abstract

Focused ion beam is rather a new type of ion beam. Its prominent feature is fine focusing ability around 100–10 nm.

Keywords

Focused ion beam Liquid metal ion source Secondary electron Scanning microscope Ion beam machining Channeling contrast 

References

  1. 1.
    Sakamoto, T., Koizumi, M., Kawasaki, J., Yamaguchi, J.: Development of a high lateral resolution TOF-SIMS apparatus for single particle analysis. Appl. Surf. Sci. 255, 1617–1620 (2008)CrossRefGoogle Scholar
  2. 2.
    Sakamoto, T., Morita, M., Takami, A., Hatakeyama, S., Murano, K., Ogawa, H., Ueda, K,: Individual analysis of aerosol particles using a high-resolution TOF-SIMS, presented at ASSAAQ13 (Atmospheric Sciences and Applications to Air Quality)Google Scholar

Copyright information

© Springer Nature Singapore Pte Ltd. 2018

Authors and Affiliations

  1. 1.Department of Applied Physics, School of Advanced EngineeringKogakuin UniversityTokyoJapan

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