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Ellipsometry

  • Toshihide TsuruEmail author
Chapter

Abstract

In general, since the amplitude and phase are different between the p- and s-polarizations of the reflected light, the reflected light is elliptically polarized. Ellipsometry precisely measures the shape of reflection ellipse by irradiating totally polarized light to a planer bulk surface, a thin film, and a multilayer.

Keywords

Polarization Reflection Complex refractive index Film thickness Complex amplitude reflectance 

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Copyright information

© Springer Nature Singapore Pte Ltd. 2018

Authors and Affiliations

  1. 1.Yamagata UniversityYamagataJapan

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