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Surface Profilometer

  • Masahiro TosaEmail author
Chapter

Abstract

Surface profilometer can measure profile of surface roughness, surface texture, surface waviness, surface step height, deposited thin film thickness, and so on by means of contacting and scanning a sharp stylus with a very small measurement force less than mN.

Keywords

Surface profile Roughness Waviness Step height Film thickness 

Reference

  1. 1.
    Kasahara, A., Kim, Y.S., Tosa, M., Yoshihara, K.: Measurement of friction force in a high vacuum. J. Vac. Soc. Jpn. 43, 986–991 (2000)CrossRefGoogle Scholar

Copyright information

© Springer Nature Singapore Pte Ltd. 2018

Authors and Affiliations

  1. 1.Tribology Group, Structure Materials CenterNational Institute for Materials ScienceTsukubaJapan

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