Tenth E.C. Photovoltaic Solar Energy Conference pp 1420-1420 | Cite as
Slicing, Cleaning and Etching thin 30×30cm wafers of Multicristalline Silicon
Conference paper
Abstract
In March 1991 a very first slicing test was performed by a very large size wire saw on a multicristalline silicon ingot having a 30×30cm cross section. The purpose of the test was to establish whether good surface finish and acceptable total thickness variations was obtainable on 180 microns thick wafers with a wire penetration over a continuous length of 30cm of material and over a continuous depth of 30 cm neither of both operating conditions having ever been done before.
Keywords
Ultrasonic Cleaning Good Surface Finish Photo Voltaic Silicon Ingot Excessive Viscosity
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References
- (1).E.N.E. 9th EC-PVSEC. Late New (Freiburg, 1989)Google Scholar
- (2).K. Shirasawa, 21st IEEE PVSC (Kyoto, 1990)Google Scholar
- (3).Kyocera Corp, 5th Int’l, PVSEC (Kyoto, 1990)Google Scholar
Copyright information
© Springer Science+Business Media Dordrecht 1991