Abstract
A low power laser processing unit, for microlithographic applications on non-planar surfaces, is described. By combining proper laser beam handling, micropositioning, software control and surface coating techniques, a 5-axis robotic system for laser writing has been set up. Light from a He-Cd laser source is fiber-delivered to a writing head, which moves around a resist coated solid object. After exposure, traditional wet processing can be applied. The unit is capable of patterning metal films deposited on samples up to a size of 50x50x100 mm, with 5 micrometer spatial resolution. An application in 3-D circuit fabrication is presented.
This is a preview of subscription content, log in via an institution to check access.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
Preview
Unable to display preview. Download preview PDF.
References
Arnone, C. (1992): “The laser-plotter: a versatile lithographic tool for integrated optics and microelectronics”-Microelectronic Engineering 17, 483.
Giaconia, C.: private communication.
Author information
Authors and Affiliations
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 1993 Springer Science+Business Media Dordrecht
About this chapter
Cite this chapter
Arnone, C., Giaconia, C., Pace, C., Bonura, S., Greco, M. (1993). Laser Beam Lithography For 3-D Surface Patterning. In: Martellucci, S., Chester, A.N., Scheggi, A.M. (eds) Laser Applications for Mechanical Industry. NATO ASI Series, vol 238. Springer, Dordrecht. https://doi.org/10.1007/978-94-011-1990-0_20
Download citation
DOI: https://doi.org/10.1007/978-94-011-1990-0_20
Publisher Name: Springer, Dordrecht
Print ISBN: 978-94-010-4879-8
Online ISBN: 978-94-011-1990-0
eBook Packages: Springer Book Archive