Micro Total Analysis Systems 2002 pp 724-726 | Cite as
Integrated Thin Film Temperature Sensors for Polycarbonate Microfluidics
Conference paper
Abstract
A technique for lithographic patterning of extremely thin metal films on polycarbonate substrates has been developed. This is used to fabricate integrated arrays of thin film temperature sensors and heaters in a polycarbonate microfluidic device.
Keywords
Temperature sensors polycarbonate integrated temperature control lithography temperature gradientPreview
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© Springer Science+Business Media Dordrecht 2002