Surface Topographical Evolution: Computational Methods of Analysis
Chapter
Abstract
The earlier paper by Carter(1) described In a very general way how an eroding or growing surface can be described in terms of non-linear wave theory and some geometrical examples of developing surfaces have been described by Nobes(2). For many practical applications however, where the characteristics are not straight lines, only computational models allow detailed quantitative calculations to be made. In three dimensions even when the characteristics are linear, the geometrical nature of the surface is usually such that computer graphics have to be used in order to visualise the physical behaviour of the eroding or growing morphology.
Keywords
Line Segment Groove Width Surface Contour Flat Plane Circular Contour
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.
Preview
Unable to display preview. Download preview PDF.
References
- 1.Carter G: These proceedings.Google Scholar
- 2.Nobes MJ: These proceedings.Google Scholar
- 3.Andersen HH Day HL: Chapter 4 in Sputtering by Particie Bombardment I (ed. Behrisch. R.) Springer Verlag. Berlin 1983Google Scholar
- 4.Sigmund P : Chapter 2 in Sputtering by Particie Bombardment I (ed. Behrisch, R.) Springer Verlag. Berlin. 1983Google Scholar
- 5.Biersak JP and Haggmark LG: Nuci. Inst, and Meth. 174, 257. 1980.CrossRefGoogle Scholar
- 6.Oechsner H: Appi. Phys. 8, 185. 1975.CrossRefGoogle Scholar
- 7.Onderdelinden D: Appl. Phys. Lett. 8. 189. 1966.CrossRefGoogle Scholar
- 8.Whitham GB: Linear and Nonlinear Waves: Wiley: New York. 1974.Google Scholar
- 9.Smith R and Walls JM: Phil. Mag. A 42. 235. 1980.CrossRefGoogle Scholar
- 10.Smith R. Tagg MA. Carter G and Nobes MJ: J. Mater. Sci. Lett. In Press. 1985.Google Scholar
- 11.Carter G and Nobes MJ: Phil. Mag. A51. 745. 1985.CrossRefGoogle Scholar
- 12.Barber DJ. Frank FC. Moss M. Steeds JW and Tsong ITS: J. Mater. Sci. 8 1030. 1973.CrossRefGoogle Scholar
- 13.Ducommun JP. Cantagrel M Moulin M: J. Mater. Sci. 10. 52. 1975CrossRefGoogle Scholar
- 14.Carter G. Coliigon JS and Nobes MJ: J. Mater. Sci. 6. 115. 1973.CrossRefGoogle Scholar
- 15.Smith R. Valkering TP and Wails JM: Phil. Mag. A44. 879. 1981.CrossRefGoogle Scholar
- 16.Smith R. Tagg. MA and Walls JM: J. Mater. Sci. In Press 1985.Google Scholar
- 17.Sykes DE. Hall DD.Thurstans RE and Walls JM: Appls. of Surf. Sci. 5. 103. 1980.Google Scholar
- 18.Makh SS. Smith R and Walls JM: J. Mater. Sci. 17. 1689. 1982.CrossRefGoogle Scholar
- 19.Neureuther AR. Liu CY and Ling CH: J. Vac. Sci. Technol. 16. 1772. 1979.CrossRefGoogle Scholar
- 20.Tassopoulos N. Hagouei P Kriezis E: ‘Microcircuit Engineering’83’ (Eds. Ahmed H, Cleaver JRA Jones GAC) Academic Press. New York, 421. 1983.Google Scholar
- 21.Wilson IH. Belson J Aucielio O: Chapter 6 in Ion Bombardment Modification of Surfaces (eds. Aucielio. O. Kelly. R.) Elsevier. Amsterdam. 1984Google Scholar
- 22.Smith R. Makh SS and Walls JM: Phil. Mag. A. 47. 453. 1983.CrossRefGoogle Scholar
Copyright information
© Martinus Nijhoff Publishers, Dordrecht 1986