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Physical Properties of Laser Written Chromium Oxide Thin Films

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Emerging Technologies for In Situ Processing

Part of the book series: NATO ASI Series ((NSSE,volume 139))

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Abstract

Deposition of chromium oxide films by Ar+ laser photolysis of chromyl chloride vapors has been recently demonstrated1. Photolytic reactions in the adsorbed layer allowed the deposition of CrO2 films on dielectric and semiconducting substrates using 488 nm radiation, with resolution down to 1 μm. Also, by photoinitiated pyrolysis of the vapor phase, single Cr2O3 filamentary crystals were grown. In this contribution a novel technique for film deposition is presented, together with optical and electrical characterization.

Work supported by Italian CNR and MPI.

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References

  1. C. Arnone, M. Rothschild, J. G. Black and D. J. Ehrlich, Appl. Phys. Lett. 48, 1018 (1986).

    Article  CAS  Google Scholar 

  2. D. J. Ehrlich and J. Y. Tsao,J. Vac. Sci. Technol. Bl,969 (1983).

    Google Scholar 

  3. D. J. Ehrlich, Polymer Engineering and Science 26, No.16 (1986).

    Article  Google Scholar 

  4. S. Sciortino, Thesis, Dpt. of El. Eng., Univ. of Palermo (1986).

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  5. C. Cali, V. Daneu, S. Riva Sanseverino, Optica Acta 27,1267 (1980).

    Article  Google Scholar 

  6. G. V. Pankina, D. I. Leikis, E. S. Sevastyanov, Elektrokhimiya 16,213 (1980).

    CAS  Google Scholar 

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Author information

Authors and Affiliations

  1. Dipartimento di Ingegneria Elettrica, Palermo, Italy

    C. Arnone

  2. Centro per la Ricerca Elettronica in Sicilia, Monreale, Italy

    C. Zizzo

Authors
  1. C. Arnone
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  2. C. Zizzo
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Editor information

Editors and Affiliations

  1. Lincoln Laboratory, Massachusetts Institute of Technology, Lexington, Massachusetts, USA

    Daniel J. Ehrlich

  2. Physics and Technologies Research Division, CNET-Grenoble, France

    Van Tran Nguyen (Director) (Director)

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© 1988 Martinus Nijhoff Publishers

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Arnone, C., Zizzo, C. (1988). Physical Properties of Laser Written Chromium Oxide Thin Films. In: Ehrlich, D.J., Nguyen, V.T. (eds) Emerging Technologies for In Situ Processing. NATO ASI Series, vol 139. Springer, Dordrecht. https://doi.org/10.1007/978-94-009-1409-4_25

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  • DOI: https://doi.org/10.1007/978-94-009-1409-4_25

  • Publisher Name: Springer, Dordrecht

  • Print ISBN: 978-94-010-7130-7

  • Online ISBN: 978-94-009-1409-4

  • eBook Packages: Springer Book Archive

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