Historical Overview on the Fundamentals of Sputtering

  • A. Oliva
Part of the NATO ASI Series book series (NSSE, volume 155)

Abstract

Since the first appearence of the word “spluttering” (the original word used by Sir J.J. Thomson) in the scientific literature [1], many papers have been published on the subject and the widespread applications of the techniques and concepts involved in sputtering studies are now of everyday use. The uses extend to fields far away from that in which sputtering phenomena were first studied and developed (e.g. I found an application of sputtering to blood cells, to remove surface layers from red blood cells! [2]).

Keywords

Differential Cross Section Elastic Collision Atomic Collision Incoming Particle Recoil Atom 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Kluwer Academic Publishers 1989

Authors and Affiliations

  • A. Oliva
    • 1
    • 2
  1. 1.Dipartimento di FisicaUniversità della CalabriaRendeItaly
  2. 2.Unità GNSM - CISM di CosenzaItaly

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