Silicon Epitaxy

  • McD. Robinson
Chapter
Part of the NATO ASI Series book series (NSSE, volume 164)

Abstract

Starting with a brief introduction and history, this chapter covers fundamental and practical aspects of silicon epitaxial growth by chemical vapor deposition (CVD). It concludes with a discussion of epitaxial silicon technology for advanced applications.

Keywords

Misfit Dislocation Deep Level Transient Spectroscopy Material Research Society Minority Carrier Lifetime Pattern Shift 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Kluwer Academic Publishers 1989

Authors and Affiliations

  • McD. Robinson
    • 1
  1. 1.ASM EpitaxyTempeUSA

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