Direct Synthesis of Metal Nitride by Laser
In this work titanium nitride synthesis is carried out by direct laser irradiation at Ti sample surface in presence of ambient nitrogen. The experimental procedure is performed in a chamber allowing plasma study by emission spectroscopy. Two pulsed laser types are used, a TEA-CO2 (10 600nm) and a XeCl excimer (308nm) in order to compare the laser-material coupling influence on the layer synthesis process depending on the laser wavelength. In both cases the titanium nitride synthesis is evidenced.
KeywordsTitanium Nitride Pulse Number Laser Power Density XeCI Laser Laser Irradiation Time
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