Imprint-Templated Nanocoax Array Architecture: Fabrication and Utilization
Arrays of vertically-oriented cylindrical, coaxial and triaxial nanostructures are fabricated from polymer nanopillar arrays prepared by nanoimprint lithography. With particular process modifications, these arrays have wide potential utility, including as molecular-scale biological (biomarker, pathogen, etc.) and chemical (explosives, environmental agents, etc.) sensors, high density neuroelectronic interfaces and retinal prostheses, radial junction photovoltaic solar cells, ultracapacitors, and optical metastructures. We report on their fabrication and example utilizations in the latter of these areas, with arrays of typical area density 106 mm−2.
KeywordsAtomic Layer Deposition Nanowire Array Plasma Enhance Chemical Vapor Deposition Nanoimprint Lithography Retinal Prosthesis
This work was supported by the W.M. Keck Foundation and the US National Cancer Institute.
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