Sensors and Microsystems pp 223-227 | Cite as
Fiber Optic Broadband Ultrasonic Probe for Virtual Biopsy: Technological Solutions
Conference paper
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Abstract
An ultrasonic probe was developed by using, in conjunction, opto-acoustic and acousto-optic devices based on fiber optic technology. A Micro-Opto-Mechanical-System (MOMS) approach is proposed to realize the broadband ultrasonic probe on micromachined silicon frames suited to be mounted on the tip of optical fibers.
Keywords
Carbon Layer Fuse Silica Substrate Fiber Optic Technology Interferometer Reflectance Opto Mechanical System
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References
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Copyright information
© Springer Science+Business Media B.V. 2011