Theoretical Analysis of a Micromotor
This chapter is dedicated to analytical and numerical analysis of electrostatic micromotor with focus on key aspects of its design and control. FE modeling and simulation is reported providing results of vibration analysis of the rotor in vacuum and viscous medium. Analytical dynamic micromotor model is presented together with results of analysis of electrostatic forces between a pair of poles together with simulations of different motor configurations and investigation of torque curves. This chapter also describes the developed control methodology of pole switching sequences of MEMS motors.