Theoretical Analysis of a Micromotor

Chapter
Part of the Intelligent Systems, Control and Automation: Science and Engineering book series (ISCA, volume 44)

Abstract

This chapter is dedicated to analytical and numerical analysis of electrostatic micromotor with focus on key aspects of its design and control. FE modeling and simulation is reported providing results of vibration analysis of the rotor in vacuum and viscous medium. Analytical dynamic micromotor model is presented together with results of analysis of electrostatic forces between a pair of poles together with simulations of different motor configurations and investigation of torque curves. This chapter also describes the developed control methodology of pole switching sequences of MEMS motors.

Keywords

Stator Pole Electrostatic Force Tangential Force Couette Flow Rotor Position 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer Science+Business Media B.V. 2010

Authors and Affiliations

  1. 1.Institute for Hi-Tech DevelopmentKaunas University of TechnologyKaunasLithuania

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