Introduction

Chapter
First Online:
Part of the Intelligent Systems, Control and Automation: Science and Engineering book series (ISCA, volume 44)

Abstract

The first chapter introduces to the field of microelectromechanical systems (MEMS) by providing a concise coverage of microfabrication technologies, common types of microactuators with particular emphasis on electrostatic MEMS switches and motors. Classification of microswitches is provided together with major application areas of micromotors. The chapter is concluded with pointing out the importance of research of MEMS dynamics and briefly outlining the scope of the monograph.

Keywords

Actuation Voltage Automate Test Equipment Electromagnetic Relay Consumer Electronic Application Electronic Bottleneck 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.
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Copyright information

© Springer Science+Business Media B.V. 2010

Authors and Affiliations

  1. 1.Institute for Hi-Tech DevelopmentKaunas University of TechnologyKaunasLithuania

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