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Carbon Film Deposition with ns Lasers

  • Bernd Schultrich
Chapter
Part of the Springer Series in Materials Science book series (SSMATERIALS, volume 263)

Abstract

n dependence on the deposition conditions, amorphous carbon films cover a broad range of different structures and correspondingly varying properties. Apart from the directly determined sp3 content (e.g. by EELS or XPS), relevant properties allow to assess the realized film qualities (see Sect.  2.1.1). Table 15.1 summarizes orienting ta-C values for minimum sp3 content (50% per definition) and maximum achievable sp3 content (around 85%).

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Copyright information

© Springer-Verlag GmbH Germany 2018

Authors and Affiliations

  • Bernd Schultrich
    • 1
  1. 1.Fraunhofer Institut für Werkstoff- und StrahltechnikDresdenGermany

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