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Experimental and Instrumental Setup

  • Danica Heller-KrippendorfEmail author
Chapter

Abstract

As discussed in Chapter 3, an appropriate application of multivariate data analysis depends on the aim of the analysis, the sample type and on the type of ToF-SIMS data (e.g. spectra, images or depth profiles). Therefore, throughout this thesis, different data sets including real world samples for failure or root cause analysis are used to highlight specific points in the discussion. The examples fall into two typically categories: either a comparison of reference and failure sample or a larger sample set including of samples with other known physical or chemical differences.

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Copyright information

© Springer Fachmedien Wiesbaden GmbH, part of Springer Nature 2019

Authors and Affiliations

  1. 1.Faculty IV: School of Science and TechnologyUniversity of SiegenSiegenGermany

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