Transducers ’01 Eurosensors XV pp 144-147 | Cite as
Single deposition GMR sensors for rotational speed sensing
Abstract
We report on the development of single deposition GMR sensors for rotational speed sensing in automotive applications. The sensor layout consists of a full Wheatstone bridge configuration with an active area of 0.25 mm2. The desired bridge configuration is achieved via a current anneal process which sets the bias directions of the two half bridges in opposite directions. These sensors show excellent performance parameters like a sensitivity of 10–18 (mV/V)/(kA/m), a hysteresis of less than 0.1 kA/m and low offset-voltage drift of 1(µV/V)/K. The sensors are stable up to fields of 200 kA/m and can withstand operation temperatures exceeding 170 °C.
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