Nanoelectromechanical Systems

  • Michael L. Roukes
Conference paper

Summary

Nanoelectromechanical systems, or NEMS, are MEMS scaled to submicron dimensions [1,2,3]. In this size regime, it is possible to attain extremely high fundamental frequencies while simultaneously preserving very high mechanical responsivity (small force constants). This powerful combination of attributes translates directly into high force sensitivity, operability at ultralow power, and the ability to induce usable nonlinearity with quite modest control forces. In my presentation I shall provide an introduction to NEMS and will outline several of their exciting initial applications.

Keywords

Nanomechanical Systems NEMS 
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References

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Copyright information

© Springer-Verlag Berlin Heidelberg 2001

Authors and Affiliations

  • Michael L. Roukes
    • 1
  1. 1.Condensed Matter Physics, 114-36California Institute of TechnologyPasadenaUSA

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