Praktische Ausführung von Kryopumpen

  • René A. Haefer
Chapter

Zusammenfassung

Ausführungsform und Betriebsweise der Kryopumpen unterscheiden sich hinsichtlich des Prinzips ihrer Kühlung, die durch ein Kältemittelbad, nach dem Verdampferprinzip oder durch einen Refrigerator erfolgen kann.

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Copyright information

© Springer-Verlag Berlin Heidelberg 1981

Authors and Affiliations

  • René A. Haefer
    • 1
    • 2
  1. 1.Forschungszentrum für ElektronenmikroskopieTechnischen Universität GrazÖsterreich
  2. 2.Konzerngruppe Physikalische GrundlagenGebrüder Sulzer AGWinterthurSchweiz

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