Removal and Drilling of Metals by Excimer Laser Radiation

  • W. Schulze
  • R. Poprawe
  • E. W. Kreutz
Conference paper

Abstract

Drilling of metals by excimer laser radiation is influenced mainly by the generated surface plasma, which absorbs a reasonable part of the incident laser radiation. The recoil of the expanding plasma originates in expulsing of the melt out of the processing area.

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Literature

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    R. Poprawe, E. Beyer, L. Bakowsky, G. Brumme and G. Herziger: Limitation of laser processing intensity by laser induced gas breakdown, Proc. Laser ‘83 (1983)Google Scholar
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    H. Kuchling: Taschenbuch der Physik, Verlag Harri Deutsch, Thun und Frankfurt/Main (1978)Google Scholar
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    M. Aden, H. Krompholz, S. Pflüger, M. Wehner, K. Wissenbach: Numerische und analytische Lösungen eindimensionaler Wärmeleitungsprobleme, ILT Bericht, Institut für Lasertechnik, Aachen (1988)Google Scholar

Copyright information

© Springer-Verlag Berlin Heidelberg 1990

Authors and Affiliations

  • W. Schulze
    • 1
  • R. Poprawe
    • 2
  • E. W. Kreutz
    • 3
  1. 1.Fraunhofer Institut für LasertechnikAachenDeutschland
  2. 2.Thyssen LasertechnikAachenDeutschland
  3. 3.RWTH AachenAachenGermany

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