Micro System Technologies 90 pp 605-610 | Cite as
Silicon RF Power Sensor from DC to Microwave
Conference paper
Summary
Precision measurement of RF power is important in RF and microwave instrumentation. Mostly diode detectors are used, but the result depends on the detector circuit and the RF waveform. Power measurements independent of waveform require a thermal sensor. The power is absorbed in a resistive termination, and the temperature rise is measured. The paper describes layout, fabrication, and results of a monolithic silicon power sensor. This work was supported by the BMFT.
Keywords
Ground Plane Seebeck Coefficient Sensor Chip Silicon Membrane Power Sensor
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Literature
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Copyright information
© Springer-Verlag Berlin Heidelberg 1990