Autocollimator Calibration Using a Tangent Bar

Part of the Topics in Intelligent Engineering and Informatics book series (TIEI, volume 1)

Abstract

The chapter describes a new low cost angle generator intended for the calibration of autocollimator. The description of the working principle is followed by the detailed calibration procedure which is based on the comparison principle. The small angles are derived from relatively large displacements. Following the presentation of the operation of the small angle generator, the various error sources are discussed. Finally the chapter discusses the calculation of the extended calibration uncertainty in details.

Keywords

Focal Plane Angular Displacement Laser Interferometer Plane Angle Gear Train 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

References

  1. 1.
    Adams, T.M.: G103-A2LA guide for estimation of uncertainty of dimensional calibration and testing results, The American Association for Laboratory Accreditation (2008)Google Scholar
  2. 2.
    Brucas, D., Giniotis, V.: Calibration of precision polygon/autocollimator measurement system. In: J. Physics Conf. Ser., vol. 2388, pp. 1–7 (2010)Google Scholar
  3. 3.
    Brucas, D., Giniotis, V.: The construction and accuracy analysis of the multireference equipment for calibration of angle measuring instruments. In: Proceedings of XIX IMEKO World Congress, Fundamental and Applied Metrology, Lisbon, Portugal, pp. 1823–1837 (2009)Google Scholar
  4. 4.
    Eom, T., Chung, D., Kim, J.: A small angle generator based on a laser angle interferometer. Int. J. Prec. Eng. Manuf. 8, 20–23 (2007)Google Scholar
  5. 5.
    EURAMET.L-K3a Angle Comparison Using AutocollimatorGoogle Scholar
  6. 6.
    ISO, Guide to the expression of uncertainty in measurement, Geneva (1993)Google Scholar
  7. 7.
    Just, A., Krause, M., Probstan, R., Wittekopf, R.: Calibration of high-resolution autocollimators against an angle comparator. Metrologia 40, 288–294 (2003)CrossRefGoogle Scholar
  8. 8.
    Kim, J.W., Kang, C.S., Kim, J.A., Eom, T., Cho, M., Kong, H.J.: A compact system for simultaneous measurement of linear and angular displacement of nano-stages. Optics Express 15 (2007)Google Scholar
  9. 9.
    Krause, M., Just, A., Geckeler, R.M., Bosse, H.: Angle metrology at the PTB: current status and development. In: Proceedings of 2011 International Dimensional Workshop, Knoxville TN, USA (2011)Google Scholar
  10. 10.
    Kruger, O.A.: Performance evaluation of phase shifting interferometer compared to an autocollimator in the measurement of angle. In: Proceedings of 2011 International Dimensional Workshop, Knoxville TN, USA (2011)Google Scholar
  11. 11.
    Kruger, O.A.: Methods for determining the effect of flatness deviations, eccentricity, and pyramidal error on angle measurements. Metrologia 37, 101–105 (2000)CrossRefGoogle Scholar
  12. 12.
    Malacara, D.: Optical shop testing, 2nd edn. Wiley (1992)Google Scholar
  13. 13.
    Shen, M.Z., Liao, S.T.: A high precision dynamic autocollimator. In: Proceedings of 2011 International Dimensional Workshop, Knoxville TN, USA (2011)Google Scholar
  14. 14.
    Sohn, Y.J., Kwon, J.H., Choe, O.S.: Portable autocollimator using the laser diode and the position sensitive detector. Rev. Sci. Instr. 69, 402–405 (1998)CrossRefGoogle Scholar
  15. 15.
    Stone, J.A., Amer, M., Faust, B., Zimmerman, J.: Uncertainties in small-angle measurement systems used to calibrate angle artifacts. J. Res. Nat. Inst. Stand. Tech. 109, 319–333 (2004)CrossRefGoogle Scholar
  16. 16.
    Valente de Oliveira, J.C., Brum Vieira, L.H.: Traceability chain and dissemination of angle measurement in Brazil. Prec. Eng. 22, 141–152 (1998)CrossRefGoogle Scholar
  17. 17.
    Vloet, R.E.J.M.: Electronic autocollimation, WPA Report 31002, Eindhoven University of Technology, Eindhoven, The Netherlands (1995)Google Scholar
  18. 18.
    Yandayan, T., Ozgur, B., Karaboce, N., Yaman, O.: High precision small angle generator for realization of SI unit of plane angle and calibration of high precision autocollimators. In: Proceedings of Macroscale (2011)Google Scholar
  19. 19.
    Hermann, G.: Calibration of an autocollimator (method and uncertainty). In: Proceedings of 6th IEEE International Symposium on Applied Computational Intelligence and Informatics (SACI 2011), Timisoara, Romania, pp. 645–647 (2011)Google Scholar

Copyright information

© Springer-Verlag GmbH Berlin Heidelberg 2012

Authors and Affiliations

  1. 1.Óbuda UniversityBudapestHungary
  2. 2.Metrology DepartmentHungarian Trade Licencing OfficeBudapestHungary

Personalised recommendations